IREM-SIL紅外發(fā)射顯微鏡系統
作者: Kevin Peng 發(fā)布于: 2015-10-30 00:47 點(diǎn)擊:次
Turnkey IREM-SIL systems built on 40 years of IR experience.
As the world leader in infrared low-light-level imaging, we design all equipment based on modularity principles to provide our clients multiple options to facilitate the extended use and technical upgrade of their existing investment in the IREM system technology.
Our technical focus is to provide highly functional, user-friendly equipment and software designed for higher resolution, precision, speed and repeatability.
We design and build industry-leading ULN image sensors, cameras, lenses, motion control, electronics control, and software -- all based on our technology developed to support the global Astronomical Research Community.
IREM-SIL Systems
The world’s most sensitive, highest lateral resolution InGaAs-based IREM
The IREM-SIL, built on the core technology of its predecessor, the IREM-II, enables unprecedented resolution and imaging for deep sub-micron levels required today and in the future.
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Resolution.
Detector/Camera
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Proprietary ULN Image Sensor
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Lowest noise, highest SNR
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Lenses
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1.1µm - 1.6µm operations
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0.3x macro lens, 1x, 10x, 25x, 100x, LIO, 2.8 NA SIL, and more
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Highest transmission and resolution SIL (<150nm)
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Repeatability.
Motion System
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8-axis
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Ultra-low parcentricity error enables precise localization (<0.5µm repeatability
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AIRIS Software
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Interface to 3rd-party software including CADNav
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Developed over 14 years with industry input
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Reliability.
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Uptime >97% worldwide
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Consistent data
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IREM-III Systems
IREM-III Photon Emission Microscope System
IRLabs invented the gold standard in IREM cameras.
The IREM-III / 3.0NA SIL delivers the sensitivity you expect with higher resolution, over 4x the viewing area. Our 1280 x 1024 array combined with self-leveling SIL lets you see more in less time.
 
Camera/Detector (Integrated Dewar Assembly)
 The world’s highest signal-to-noise ratio camera in our proprietary ULN Image Sensor.
The proprietary InGaAs-based focal plane array (FPA) with unmatched signal-to-noise ratio, makes this the most sensitive Infrared Emission camera in the industry
Combined with our high numerical aperture near-IR optimized lenses, it allows you to detect and localize even the faintest emission sites indicative of defects faster and more accurately.
Lens
The highest optical quality in the industry.
Our lenses deliver unmatched precision in locating potential faults.
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Highest transmission and resolution SILs designed for 1.1um to 1.6um operations.
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0.3 macro lens 1x, 10x, 20x, 25x, 100x, LIO, SIL, and other magnification.
Lens Slide, Motion System & Electronics Control Subsystems
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Lens Slide
Four times faster and an order of magnitude better resolution. Get fast, repeatable performance without loss of region of interest (ROI) by upgrading your 2- or 3-position lens slide to a new high-speed, high-resolution, closed loop lens slide:
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Now 100nm resolution.
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"Pan from static" -- fast and accurate panning from static guide image.
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Kinematically mounted sectors preserve offset value (parcentricity) accuracy for fast lens swaps and sector swaps.
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Return to same ROI following lens swap for most consistent imaging and best reporting.
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High-speed lens slide travel.
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Ready for future SIL lens sector upgrade.
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Motion Control System
Stage and Ultra-Precise Motion Control
This system uses an open-frame architecture and drives the moving mass at the center of gravity, minimizing residual vibration for rapid “in-position” settling. High resolution encoders allow for extremely small, controlled camera motions. In addition, the system features pneumatic vibration isolation with a low, well-damped resonant frequency, ensuring that vibrations are not transmitted to the DUT or camera.
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8-axis for the highest in-position stability and lowest possible long-term drift.
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Ultra-low parcentricity error for precise localization.
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X-Y-Z stage is specifically designed for production test measurement and inspection applications requiring transmitted illumination or center mounting of an imaging/sensing transducer.
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Auxiliary Electronics
Save time and improve quality for day-to-day repeatability with this power supply and motion controller for the Lens Slide:
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High-speed, high-repeatability motion control for improved parcentricity.
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Constant current sources for the illuminators to maintain image consistency for day-to-day repeatability and temporally stable illumination.
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Full software control for selection of illuminators.
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AIRIS Software
Our IREM-SIL is fully supported by AIRIS, our Advanced Infrared Emission Imaging Software.
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Designed from our 14 years of IREM expertise and customer input
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Based on image-processing functions based on techniques originally developed for astronomical application
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Algorithms enhance spatial resolution and localization to help optimize signal-to-noise along with real-time image conditioning such as precision flat-fielding
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Hardware operations are well integrated with the software to yield optimum results
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Display and Imaging Functions
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Advanced Mosaic features to enhance efficiency of large die imaging
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Overlay emission images, illuminated device images, and CAD data/polygons to find problems faster
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Region of Interest (ROI) - select and analyze a device area or sub-field
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Sub-stepping, deconvolution, digital zoom
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Advanced imaging features for more speed and accuracy.
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Post-processing tools
Navigation Functions
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GUI interface designed for FA/debug engineers
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CADNav features for easier overlay configuration
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More automated features to save time and increase accuracy
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Stage and lens slide control features to improve speed and crash safety
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Panning, absolute move, relative move, reference points, point database, chip profile
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Hot keys for faster operations
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